Magma announces Excalibur-Litho fab analysis framework

 

Magma® Design Automation Inc.,a provider of chip design software, today announced Excalibur-Litho™, a complete fab analysis framework that supports the development and monitoring of advanced lithography solutions. Excalibur-Litho is the first system to efficiently integrate design and real-time data from the semiconductor manufacturing floor, including defectivity, metrology and tool history, enabling an unmatched level of data analysis, monitoring and process control. Excalibur-Litho optimizes yield ramps with built-in solutions for litho qualification through the proprietary coupling of design-based binning, electrical cross mapping, and fab-wide data correlation. This enables unprecedented defect isolation and root cause analysis.



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