The idea of test pattern and rule file generation from generic rules is not very far off
in this fast time to verifiy and TTM. The techology growth warrants action for reliable generator and demands a standardization on the rule format. The cohesive force needs to come together and works towards a system rather than wholly depends on the time varying data from the process values.
The methodology remember should address the switches for litho, laser and forthcomig
geometrical corrections independent of the process technology